000			01818 a2200277 4500
001			1420045717
005			20250317111627.0
008			250312042018xx eng
020			_a9781420045710
037			_bTaylor & Francis _cGBP 65.99 _fBB
040			_a01
041			_aeng
072	7		_aTBN _2thema
072	7		_aTBN _2bic
072	7		_aTEC027000 _2bisac
072	7		_aSCI053000 _2bisac
072	7		_aTEC007000 _2bisac
072	7		_aTEC008070 _2bisac
072	7		_a621.381 _2bisac
100	1		_aAi-Qun Liu
245	1	0	_aPhotonic MEMS Devices _bDesign, Fabrication and Control
250			_a1
260			_bCRC Press _c20181008
300			_a502 p
520			_bPhotonic MEMS devices represent the next major breakthrough in the silicon revolution. While many quality resources exist on the optic and photonic aspect of device physics, today’s researchers are in need of a reference that goes beyond to include all aspects of engineering innovation. An extension on traditional design and analysis, Photonic MEMS Devices: Design, Fabrication, and Control describes a broad range of optical and photonic devices, from MEMS optical switches and bandgap crystal switches to optical variable attenuators (VOA) and injection locked tunable lasers. It deals rigorously with all these technologies at a fundamental level, systematically introducing critical nomenclature. Each chapter also provides analysis techniques, equations, and experimental results. The book focuses not only on traditional design analysis, but also provides extensive background on realistic simulation and fabrication processes. With a clear attention to experimental relevance, this book provides the fundamental knowledge needed to take the next-step in integrating photonic MEMS devices into commercial products and technology.
999			_c6323 _d6323